Granted Patent
Utility
US 6,334,880 · App. 09/454,586
Abrasive media and aqueous slurries for chemical mechanical polishing and planarization
Inventors:
John A. Negrych, George Haag, Peter E. Rall, William J. Corbell
Patented Case
View Patent ↗
Granted: Jan 1, 2002
Filed: Dec 7, 1999
Inventors
John A. Negrych
George Haag
Peter E. Rall
William J. Corbell
Assignee (at issue)
SILBOND CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.