Granted Patent
Utility
US 6,335,130 · App. 09/562,445
System and method of providing optical proximity correction for features using phase-shifted halftone transparent/semi-transparent features
Inventors:
J. Fung Chen, John S. Petersen
Patented Case
View Patent ↗
Granted: Jan 1, 2002
Filed: May 1, 2000
Inventors
J. Fung Chen
John S. Petersen
Assignee (at issue)
ASML Masktools Netherlands B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.