Granted Patent
Utility
US 6,335,143 · App. 09/100,973
Resist composition containing specific cross-linking agent
Inventors:
Motoshige Sumino, Hirotoshi Fujie, Akiko Katsuyama, Masayuki Endo
Patented Case
View Patent ↗
Granted: Jan 1, 2002
Filed: Jun 22, 1998
Inventors
Motoshige Sumino
Hirotoshi Fujie
Akiko Katsuyama
Masayuki Endo
Assignees (at issue)
WAKO PURE CHEMICAL INDUSTRIES, LTD.
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.