Granted Patent
Utility
US 6,335,278 · App. 09/455,909
Method of hydrogen anneal to a semiconductor substrate
Inventor:
Shuji Miyazaki
Patented Case
View Patent ↗
Granted: Jan 1, 2002
Filed: Dec 7, 1999
Inventor
Shuji Miyazaki
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.