Granted Patent
Utility
US 6,336,975 · App. 09/533,244
Thin film forming equipment and method
Inventors:
Yukio Morishige, Makoto Omiya
Patented Case
View Patent ↗
Granted: Jan 8, 2002
Filed: Mar 22, 2000
Inventors
Yukio Morishige
Makoto Omiya
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.