Granted Patent
Utility
US 6,337,872 · App. 09/422,857
Once through fan for excimer laser apparatus
Inventors:
Hisashi Nara, Kiyoharu Nakao, Hakaru Mizoguchi, Toshihiro Nishisaka, Tatsuo Enami
Patented Case
View Patent ↗
Granted: Jan 8, 2002
Filed: Oct 25, 1999
Inventors
Hisashi Nara
Kiyoharu Nakao
Hakaru Mizoguchi
Toshihiro Nishisaka
Tatsuo Enami
Assignees (at issue)
KOMATSU LTD.
EBARA CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.