IP Library › Granted Patent US 6,342,542
Granted Patent Utility
US 6,342,542 · App. 09/600,052

Radiation-sensitive resin composition

Inventors: Satoshi Kobayashi, Hidekazu Shioda, Haruhiko Itoh
Patented Case View Patent ↗
Granted: Jan 29, 2002 Filed: Oct 12, 2000
Inventors
Satoshi Kobayashi
Hidekazu Shioda
Haruhiko Itoh
Assignee (at issue)
Clariant Finance (BVI) Limited

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Quick Facts
Patent No.
US 6,342,542
App. No.
09/600,052
Filed
2000-10-12
Granted
2002-01-29
Kind
B1