Granted Patent
Utility
US 6,346,354 · App. 09/533,265
Pattern writing method
Inventors:
Takayuki Abe, Hirohito Anze, Susumu Oogi, Mitsuko Shimizu, Hideo Inoue, Takashi Saito, Toru Tojo, Takashi Kamikubo, Yoshiaki Hattori, Tomohiro Iijima, Noriaki Nakayamada
Patented Case
View Patent ↗
Granted: Feb 12, 2002
Filed: Mar 20, 2000
Inventors
Takayuki Abe
Hirohito Anze
Susumu Oogi
Mitsuko Shimizu
Hideo Inoue
Takashi Saito
Toru Tojo
Takashi Kamikubo
Yoshiaki Hattori
Tomohiro Iijima
Noriaki Nakayamada
Assignee (at issue)
Kabushiki Kaisha Toshiba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.