IP Library › Granted Patent US 6,348,239
Granted Patent Utility
US 6,348,239 · App. 09/561,744

Method for depositing metal and metal oxide films and patterned films

Inventors: Ross Hill, Yo Mao Shi
Patented Case View Patent ↗
Granted: Feb 19, 2002 Filed: Apr 28, 2000
Inventors
Ross Hill
Yo Mao Shi
Assignee (at issue)
Simon Fraser University

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Quick Facts
Patent No.
US 6,348,239
App. No.
09/561,744
Filed
2000-04-28
Granted
2002-02-19
Kind
B1