Granted Patent
Utility
US 6,348,414 · App. 09/471,575
Method for forming fine metal patterns by using damascene technique
Inventors:
Hee-Yong Yun, Sung Keun Chang
Patented Case
View Patent ↗
Granted: Feb 19, 2002
Filed: Dec 21, 1999
Inventors
Hee-Yong Yun
Sung Keun Chang
Assignee (at issue)
Hyundai Electronics Industries Co. Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.