Granted Patent
Utility
US 6,358,666 · App. 09/616,859
Chemically amplified resist composition containing norbornane type low molecular additive
Inventors:
Dong-Chul Seo, Sun-Yi Park, Joo-Hyeon Park, Seong Ju Kim
Patented Case
View Patent ↗
Granted: Mar 19, 2002
Filed: Jul 14, 2000
Inventors
Dong-Chul Seo
Sun-Yi Park
Joo-Hyeon Park
Seong Ju Kim
Assignee (at issue)
KOREA KUMHO PETROCHEMICAL CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.