Granted Patent
Utility
US 6,360,012 · App. 09/344,664
In situ projection optic metrology method and apparatus
Inventor:
Justin Kreuzer
Patented Case
View Patent ↗
Granted: Mar 19, 2002
Filed: Jun 25, 1999
Inventor
Justin Kreuzer
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.