Granted Patent
Utility
US 6,362,512 · App. 09/468,423
Microelectromechanical structures defined from silicon on insulator wafers
Inventors:
Joel A. Kubby, Jingkuang Chen, Alex T. Tran
Patented Case
View Patent ↗
Granted: Mar 26, 2002
Filed: Dec 21, 1999
Inventors
Joel A. Kubby
Jingkuang Chen
Alex T. Tran
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.