Granted Patent
Utility
US 6,365,425 · App. 09/604,251
Method of manufacturing semiconductor device
Inventors:
Masami Ikota, Aritoshi Sugimoto, Hisato Nakamura
Patented Case
View Patent ↗
Granted: Apr 2, 2002
Filed: Jun 27, 2000
Inventors
Masami Ikota
Aritoshi Sugimoto
Hisato Nakamura
Assignees (at issue)
HITACHI, LTD.
Hitachi Electronics Engineering Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.