Granted Patent
Utility
US 6,365,476 · App. 09/698,670
Laser thermal process for fabricating field-effect transistors
Inventors:
Somit Talwar, Yun Wang
Patented Case
View Patent ↗
Granted: Apr 2, 2002
Filed: Oct 27, 2000
Inventors
Somit Talwar
Yun Wang
Assignee (at issue)
Ultratech Stepper, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.