Granted Patent
Utility
US 6,370,005 · App. 09/417,736
Electrostatic sensing chuck using area matched electrodes
Inventors:
Hoi-Cheong Steve Sun, Nitin V. Desai, William R. Roach, David Norman Ludington, Timothy Allen Pletcher, David Keller, Frank B. Lang, Peter D. Southgate, Joseph Thomas McGinn
Patented Case
View Patent ↗
Granted: Apr 9, 2002
Filed: Oct 14, 1999
Inventors
Hoi-Cheong Steve Sun
Nitin V. Desai
William R. Roach
David Norman Ludington
Timothy Allen Pletcher
David Keller
Frank B. Lang
Peter D. Southgate
Joseph Thomas McGinn
Assignee (at issue)
Delsys Pharmaceutical Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.