Granted Patent
Utility
US 6,373,272 · App. 09/142,391
Arrangement for the testing of semiconductor structures
Inventors:
Reinhard Welsch, Claus Dietrich, Thomas Huelsmann, Dietmar Runge
Patented Case
View Patent ↗
Granted: Apr 16, 2002
Filed: Sep 16, 1998
Inventors
Reinhard Welsch
Claus Dietrich
Thomas Huelsmann
Dietmar Runge
Assignee (at issue)
Karl Suss Dresden GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.