Granted Patent
Utility
US 6,375,541 · App. 09/483,576
Polishing fluid polishing method semiconductor device and semiconductor device fabrication method
Inventors:
Sailesh Mansinh Merchant, Sudhanshu Misra, Pradip K. Roy, Hem M. Vaidya
Patented Case
View Patent ↗
Granted: Apr 23, 2002
Filed: Jan 14, 2000
Inventors
Sailesh Mansinh Merchant
Sudhanshu Misra
Pradip K. Roy
Hem M. Vaidya
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.