Granted Patent
Utility
US 6,376,395 · App. 09/481,080
Semiconductor wafer manufacturing process
Inventors:
Jiri L. Vasat, Andrei Stefanescu, Thomas M. Hanley
Patented Case
View Patent ↗
Granted: Apr 23, 2002
Filed: Jan 11, 2000
Inventors
Jiri L. Vasat
Andrei Stefanescu
Thomas M. Hanley
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.