Granted Patent
Utility
US 6,376,893 · App. 09/638,866
Trench isolation structure and fabrication method thereof
Inventor:
Kwan Goo Rha
Patented Case
View Patent ↗
Granted: Apr 23, 2002
Filed: Aug 15, 2000
Inventor
Kwan Goo Rha
Assignee (at issue)
Hyundai Electronics Industries Co. Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.