Granted Patent
Utility
US 6,380,074 · App. 09/666,526
Deposition of various base layers for selective layer growth in semiconductor production
Inventors:
Markus Kirchhoff, Hans-Peter Sperlich, Uwe Schilling, Zvonimir Gabric, Oswald Spindler, Stephan Wege, Hans Glawischnig
Patented Case
View Patent ↗
Granted: Apr 30, 2002
Filed: Sep 18, 2000
Inventors
Markus Kirchhoff
Hans-Peter Sperlich
Uwe Schilling
Zvonimir Gabric
Oswald Spindler
Stephan Wege
Hans Glawischnig
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.