Granted Patent
Utility
US 6,384,460 · App. 09/326,340
Self-aligned metal electrode structure for elevated sensors
Inventors:
Jeremy Alfred Theil, Min Cao
Patented Case
View Patent ↗
Granted: May 7, 2002
Filed: Jun 7, 1999
Inventors
Jeremy Alfred Theil
Min Cao
Assignee (at issue)
Agilent Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.