Granted Patent
Utility
US 6,385,863 · App. 09/586,762
Process and device for drying disk-like objects
Inventor:
Hans-Jurgen Kruwinus
Patented Case
View Patent ↗
Granted: May 14, 2002
Filed: Jun 5, 2000
Inventor
Hans-Jurgen Kruwinus
Assignee (at issue)
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.