Granted Patent
Utility
US 6,387,139 · App. 09/968,846
Cerium oxide slurry for polishing, process for preparing the slurry, and process for polishing with the slurry
Inventors:
Takanori Kido, Masayuki Sanbayashi, Fumio Tsujino, Kagetaka Ichikawa
Patented Case
View Patent ↗
Granted: May 14, 2002
Filed: Oct 3, 2001
Inventors
Takanori Kido
Masayuki Sanbayashi
Fumio Tsujino
Kagetaka Ichikawa
Assignee (at issue)
Showa Denko K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.