Granted Patent
Utility
US 6,387,820 · App. 09/664,950
BC13/AR chemistry for metal overetching on a high density plasma etcher
Inventor:
Anne E. Sanderfer
Patented Case
View Patent ↗
Granted: May 14, 2002
Filed: Sep 19, 2000
Inventor
Anne E. Sanderfer
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.