Granted Patent
Utility
US 6,388,297 · App. 09/547,834
Structure and method for an optical block in shallow trench isolation for improved laser anneal control
Inventors:
Somit Talwar, John Cronin
Patented Case
View Patent ↗
Granted: May 14, 2002
Filed: Apr 12, 2000
Inventors
Somit Talwar
John Cronin
Assignee (at issue)
Ultratech Stepper, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.