Granted Patent
Utility
US 6,389,045 · App. 09/550,558
Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers
Inventors:
Klaus Mann, Thomas Schroder, Bernd Schafer, Uwe Leinhos, Uwe Stamm
Patented Case
View Patent ↗
Granted: May 14, 2002
Filed: Apr 17, 2000
Inventors
Klaus Mann
Thomas Schroder
Bernd Schafer
Uwe Leinhos
Uwe Stamm
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.