Granted Patent
Utility
US 6,395,647 · App. 09/388,570
Chemical treatment of semiconductor substrates
Inventors:
Li Li, Weimin Li
Patented Case
View Patent ↗
Granted: May 28, 2002
Filed: Sep 2, 1999
Inventors
Li Li
Weimin Li
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.