Granted Patent
Utility
US 6,399,488 · App. 09/879,555
Method of manufacturing a contact plug in a semiconductor device
Inventors:
Dong-Suk Shin, Woo Seok Cheong, Bong-Soo Kim
Patented Case
View Patent ↗
Granted: Jun 4, 2002
Filed: Jun 12, 2001
Inventors
Dong-Suk Shin
Woo Seok Cheong
Bong-Soo Kim
Assignee (at issue)
Hyundai Electronics Industries Co. Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.