Granted Patent
Utility
US 6,406,363 · App. 09/386,741
Unsupported chemical mechanical polishing belt
Inventors:
Cangshan Xu, Brian Lombardo
Patented Case
View Patent ↗
Granted: Jun 18, 2002
Filed: Aug 31, 1999
Inventors
Cangshan Xu
Brian Lombardo
Assignees (at issue)
Lam Research Corporation
Peripheral Products Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.