Granted Patent
Utility
US 6,410,361 · App. 09/777,749
Methods of fabricating in-plane MEMS thermal actuators
Inventors:
Vijayakumar R. Dhuler, Edward A. Hill, Allen Cowen
Patented Case
View Patent ↗
Granted: Jun 25, 2002
Filed: Feb 6, 2001
Inventors
Vijayakumar R. Dhuler
Edward A. Hill
Allen Cowen
Assignee (at issue)
JDS Uniphase Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.