Granted Patent
Utility
US 6,423,651 · App. 08/492,108
Insulating film of semiconductor device and coating solution for forming insulating film and method of manufacturing insulating film
Inventors:
Tadashi Nakano, Kyoji Tokunaga
Patented Case
View Patent ↗
Granted: Jul 23, 2002
Filed: Aug 29, 1995
Inventors
Tadashi Nakano
Kyoji Tokunaga
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.