Granted Patent
Utility
US 6,426,860 · App. 09/600,630
Holding device for a substrate
Inventors:
Gerhard Schubert, Ulf-Carsten Kirschstein, Stefan Risse, Gerd Harnisch, Gerhard Kalkowski, Volker Guyenot
Patented Case
View Patent ↗
Granted: Jul 30, 2002
Filed: Sep 19, 2000
Inventors
Gerhard Schubert
Ulf-Carsten Kirschstein
Stefan Risse
Gerd Harnisch
Gerhard Kalkowski
Volker Guyenot
Assignee (at issue)
Leica Microsystems Lithography
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.