Granted Patent
Utility
US 6,428,713 · App. 09/410,713
MEMS sensor structure and microfabrication process therefor
Inventors:
John C. Christenson, Steven E. Staller, John E. Freeman, Troy Chase, Robert Lawrence Healton, David B. Rich
Patented Case
View Patent ↗
Granted: Aug 6, 2002
Filed: Oct 1, 1999
Inventors
John C. Christenson
Steven E. Staller
John E. Freeman
Troy Chase
Robert Lawrence Healton
David B. Rich
Assignee (at issue)
Delphi Technologies
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.