Granted Patent
Utility
US 6,435,200 · App. 09/556,426
Device and process for liquid treatment of wafer-shaped articles
Inventor:
Kurt Langen
Patented Case
View Patent ↗
Granted: Aug 20, 2002
Filed: Apr 24, 2000
Inventor
Kurt Langen
Assignee (at issue)
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.