Granted Patent
Utility
US 6,435,428 · App. 09/776,004
Showerhead apparatus for radical-assisted deposition
Inventors:
Jae-Ho Kim, In Chel Shin, Sang-Joon Park, Kwan Goo Rha, Sang-Ho Kim
Patented Case
View Patent ↗
Granted: Aug 20, 2002
Filed: Feb 2, 2001
Inventors
Jae-Ho Kim
In Chel Shin
Sang-Joon Park
Kwan Goo Rha
Sang-Ho Kim
Assignee (at issue)
Apex Co. Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.