Granted Patent
Utility
US 6,442,858 · App. 09/494,923
Positioning apparatus, exposure apparatus, device manufacturing method, and positioning method
Inventor:
Tosiya Asano
Patented Case
View Patent ↗
Granted: Sep 3, 2002
Filed: Feb 1, 2000
Inventor
Tosiya Asano
Assignee (at issue)
CANON KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.