IP Library › Granted Patent US 6,444,538
Granted Patent Utility
US 6,444,538 · App. 09/735,626

Method for manufacturing a semiconductor memory device using hemispherical grain silicon

Inventors: Se Han Kwon, Jang-Yup Kim
Patented Case View Patent ↗
Granted: Sep 3, 2002 Filed: Dec 14, 2000
Inventors
Se Han Kwon
Jang-Yup Kim
Assignee (at issue)
Hyundai Electronics Industries Co. Ltd.

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Quick Facts
Patent No.
US 6,444,538
App. No.
09/735,626
Filed
2000-12-14
Granted
2002-09-03
Kind
B2