Granted Patent
Utility
US 6,445,439 · App. 09/473,259
EUV reticle thermal management
Inventor:
Andrew W. McCullough
Patented Case
View Patent ↗
Granted: Sep 3, 2002
Filed: Dec 27, 1999
Inventor
Andrew W. McCullough
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.