IP Library › Granted Patent US 6,447,563
Granted Patent Utility
US 6,447,563 · App. 09/425,358

Chemical mechanical polishing slurry system having an activator solution

Inventor: Deepak Mahulikar
Patented Case View Patent ↗
Granted: Sep 10, 2002 Filed: Oct 22, 1999
Inventor
Deepak Mahulikar
Assignee (at issue)
Arch Specialty Chemicals, Inc.

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Quick Facts
Patent No.
US 6,447,563
App. No.
09/425,358
Filed
1999-10-22
Granted
2002-09-10
Kind
B1