Granted Patent
Utility
US 6,447,635 · App. 09/379,663
Plasma processing system and system using wide area planar antenna
Inventor:
Yunju Ra
Patented Case
View Patent ↗
Granted: Sep 10, 2002
Filed: Aug 24, 1999
Inventor
Yunju Ra
Assignee (at issue)
Bethel Material Research
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.