Granted Patent
Utility
US 6,447,853 · App. 09/449,347
Method and apparatus for processing semiconductor substrates
Inventors:
Katsunori Suzuki, Hidetaka Horiuchi, Yasushi Kikuchi, Jin Yokogawa, Ryouichi Kubo, Koji Wakabayashi
Patented Case
View Patent ↗
Granted: Sep 10, 2002
Filed: Nov 24, 1999
Inventors
Katsunori Suzuki
Hidetaka Horiuchi
Yasushi Kikuchi
Jin Yokogawa
Ryouichi Kubo
Koji Wakabayashi
Assignee (at issue)
Kawasaki Microelectronics, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.