Granted Patent
Utility
US 6,453,005 · App. 09/756,018
SiO2-coated mirror substrate for EUV
Inventor:
Winfried Kaiser
Patented Case
View Patent ↗
Granted: Sep 17, 2002
Filed: Jan 5, 2001
Inventor
Winfried Kaiser
Assignee (at issue)
Carl Zeiss Stiftung
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.