Granted Patent
Utility
US 6,459,523 · App. 09/746,291
Galvano-micromirror and its manufacture process
Inventor:
Satoshi Ueda
Patented Case
View Patent ↗
Granted: Oct 1, 2002
Filed: Dec 20, 2000
Inventor
Satoshi Ueda
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.