Granted Patent
Utility
US 6,464,445 · App. 09/740,125
System and method for improved throughput of semiconductor wafer processing
Inventors:
Brian M. Knapik, David Lawson, Gregory Proctor
Patented Case
View Patent ↗
Granted: Oct 15, 2002
Filed: Dec 19, 2000
Inventors
Brian M. Knapik
David Lawson
Gregory Proctor
Assignee (at issue)
Infineon Technologies Richmond, LP
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.