Granted Patent
Utility
US 6,466,308 · App. 09/547,849
Method for measuring a thermal expansion coefficient of a thin film by using phase shifting interferometry
Inventors:
Cheng-Chung Jaing, Cheng-Chung Lee, Chuen-Lin Tien, Ing-Jer Ho
Patented Case
View Patent ↗
Granted: Oct 15, 2002
Filed: Apr 12, 2000
Inventors
Cheng-Chung Jaing
Cheng-Chung Lee
Chuen-Lin Tien
Ing-Jer Ho
Assignee (at issue)
Precision Instrument Development Center of National Science Council
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.