Granted Patent
Utility
US 6,466,599 · App. 09/453,670
Discharge unit for a high repetition rate excimer or molecular fluorine laser
Inventors:
Igor Bragin, Vadim Berger, Uwe Stamm, Ulrich Rebhan
Patented Case
View Patent ↗
Granted: Oct 15, 2002
Filed: Dec 3, 1999
Inventors
Igor Bragin
Vadim Berger
Uwe Stamm
Ulrich Rebhan
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.