Granted Patent
Utility
US 6,466,602 · App. 09/590,961
Gas discharge laser long life electrodes
Inventors:
Vladimir B. Fleurov, Michael C. Cates, Michael Du'Lyea, Igor V. Fomenkov, Dmitri V. Gaidarenko, Jean-Marc Hueber, Richard G. Morton, Eckehard D. Onkels, Robert A. Shannon, Ross H. Winnick
Patented Case
View Patent ↗
Granted: Oct 15, 2002
Filed: Jun 9, 2000
Inventors
Vladimir B. Fleurov
Michael C. Cates
Michael Du'Lyea
Igor V. Fomenkov
Dmitri V. Gaidarenko
Jean-Marc Hueber
Richard G. Morton
Eckehard D. Onkels
Robert A. Shannon
Ross H. Winnick
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.