Granted Patent
Utility
US 6,469,793 · App. 09/371,337
Multi-channel grating interference alignment sensor
Inventor:
Stuart Stanton
Patented Case
View Patent ↗
Granted: Oct 22, 2002
Filed: Aug 10, 1999
Inventor
Stuart Stanton
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.