Granted Patent
Utility
US 6,472,334 · App. 09/824,106
Film forming method, semiconductor device manufacturing method, and semiconductor device
Inventors:
Hiroshi Ikakura, Tomomi Suzuki, Kazuo Maeda, Yoshimi Shioya, Kouichi Ohira
Patented Case
View Patent ↗
Granted: Oct 29, 2002
Filed: Apr 3, 2001
Inventors
Hiroshi Ikakura
Tomomi Suzuki
Kazuo Maeda
Yoshimi Shioya
Kouichi Ohira
Assignees (at issue)
Canon Sales Co., Inc.
Semiconductor Process Laboratory Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.